NH_4+ H_3O+ Na+ C_2H_3+ Si+ C_2H_5+ CH_3O+ O_2H_5+ C_3H_3+ C_3H_5+ C_2H_3O+ C_2H_5O+ C_4H_5+ C_4H_7+ C_4H_5O+ C_4H_5N_2+ C_4H_6N_2+ C_4H_7O_2+ O_5H_11+ O_6H_13+ C_6H_9O_2+ O_7H_15+ O_8H_17+ O_9H_19+ O_10H_21+ O_11H_23+ 18.0362 19.0202 22.9917 27.0254 27.9780 29.0418 31.0205 37.0308 39.0259 41.0426 43.0211 45.0385 53.0434 55.0601 69.0410 81.0383 82.0473 87.0527 91.0610 109.0771 113.0708 127.0866 145.1052 163.0940 181.1119 199.1312 Sputter Time (s) Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity 3.2768 747.214 935.849 6089.89 6796.92 117.246 7275.35 1960.95 10.0204 6456.34 23419.2 7490.23 20191.9 4924.79 12244.6 12191.7 1106.96 569.085 2313.78 3177.92 2183.7 4023.62 396.156 396.827 154.859 126.601 172.618 9.8304 371.389 1101.06 6625.81 6171.08 543.833 3769.11 2037.82 3.00669 6290.47 17537.1 7225.08 20260.2 4354.43 6144.82 12051.9 905.027 474.661 2033.14 2469.4 2014.49 3953.2 396.44 330.724 168.793 111.362 137.422 16.3840 247.666 1027.74 6953.15 5693.4 934.412 3164.27 2050.98 4.00829 5888.48 15786.3 6584.88 18461.5 4110.05 5031.61 11175.4 871.488 464.58 1831.15 2380.21 1855.08 3453.77 402.572 342.675 148.633 110.37 140.45 22.9376 214.528 1017.76 7086.1 5381.79 1269.26 3000.39 1904.68 5.00982 5933.9 15002.1 6322.08 17496.9 4044.93 4764.42 10678.7 893.808 423.968 1731.1 2535.4 1853.44 3276.16 421.664 329.643 139.626 125.441 146.441 29.4912 166.333 952.442 7102.64 5391.56 1462.59 3008.08 1850.16 4.0081 5875.44 14442.3 5900.87 17173.9 4070.37 4806.85 10366.3 840.758 470.325 1653.18 2494.02 1762.53 3109.13 388.082 329.575 168.869 105.347 138.411 36.0448 154.307 970.817 7086.54 5254.3 1650.99 2957.37 1803.98 3.00591 5762.61 14425.1 5923.64 16923.9 3955.33 4611.65 9863.64 887.773 441.912 1623.78 2484.67 1678.82 3157.87 405.533 340.564 142.673 134.54 117.331 42.5984 144.265 913.915 7022.44 5250.87 1856.31 2794.4 1821.92 3.00465 5866.28 14416.4 5714.68 16447.3 4059.14 4641.69 9987.29 810.316 414.856 1653.19 2398.11 1664.04 2962.91 439.286 355.833 138.595 116.393 130.348 49.1520 121.191 902.802 6777.95 5267.42 1990.45 2835.91 1822.31 4.00708 5902.13 13815.8 5548.91 16207.4 3999.52 4546.13 9817.81 810.149 433.807 1557.62 2522.33 1609.45 2901.88 391.296 338.674 133.564 104.387 138.364 55.7056 116.175 921.077 6802.45 5116.26 2036.3 2627.09 1790.88 5.00883 5788.87 13741.5 5497.43 16057.9 3888.97 4510.8 9705.69 830.139 445.056 1556.14 2439.83 1667.17 2880.76 384.993 307.3 150.642 123.454 142.374 62.2592 132.245 854.068 6879.4 4982.37 2260.16 2625.9 1799.25 4.00702 5668.09 13771.5 5265.19 15605.8 3787.71 4495.82 9356.39 802.02 423.823 1588.42 2455.26 1609.5 2822.86 377.073 278.875 152.651 116.444 127.326 68.8128 105.163 875.31 7210.97 4843.31 2347.61 2598.36 1666.88 8.01647 5360.72 13490.1 5249.53 15223.3 3647.24 4229.56 9242.54 790.599 394.495 1426.78 2275.22 1503.74 2631.3 372.912 300.052 153.671 121.431 130.353 75.3664 135.24 772.998 8058.96 4624.97 3067.65 2505.01 1659.24 3.00574 5123.36 12359.4 4708.06 13733.5 3524.41 3971.4 8240.11 704.307 383.264 1332.58 2208.5 1381.62 2418.58 360.675 279.881 123.519 118.447 127.289 81.9200 121.227 743.657 8841.12 4234.81 3805.71 2379.44 1487.63 4.00702 4680.54 11044.9 4193.48 12252.8 3071.79 3443.8 7104.95 612.293 310.566 1172.93 1899.04 1150.84 2134.13 301.418 224.218 103.33 86.2951 104.275 88.4736 115.211 557.775 10220.3 3564.38 5032.71 1948.52 1172.43 3.00497 4267.23 8901.88 3440.81 9686.3 2486.17 2720.1 5432.12 485.848 251.03 868.446 1488.49 905.386 1653.09 200.383 178.914 79.2176 56.1522 95.2092 95.0272 107.176 468.983 10812.9 2846.05 7038.08 1469.86 945.765 7.00988 3175.21 6720.24 2676.41 6816.67 1855.12 1951.34 3918.95 369.571 192.624 643.194 1098.77 607.984 1134.75 166.852 131.468 48.1229 52.1083 61.1125 101.5808 96.1233 313.918 11116.2 2133.84 9149.13 1080.85 674.992 4.00452 2335.78 4630.74 1748.68 4595.28 1277.4 1397.86 2672.59 271.979 111.223 444.446 748.309 396.109 765.851 104.369 94.2511 42.0695 35.0644 38.0477 108.1344 61.0697 205.422 11043.3 1477.81 11413.4 643.713 421.758 3.00322 1665.13 3270.86 1157.83 3050.33 931.64 943.421 1792.29 163.362 81.1232 251.84 516.741 293.12 532.354 68.1617 55.1023 33.0438 17.0227 36.0424 114.6880 54.0463 137.209 10974.4 1042.73 13170.7 467.852 287.886 0 1244.43 2325.09 822.095 2188.46 590.319 639.9 1351.05 116.155 68.0781 216.68 409.915 240.735 351.561 63.1188 54.0722 20.0196 13.0151 32.0278 121.2416 32.0297 101.113 10726.6 728.282 15012.8 349.345 206.493 0 850.718 1705.53 624.372 1735.28 507.064 477.878 1019.14 91.1091 52.0534 158.333 293.571 158.397 312.137 37.0584 34.0364 10.0081 14.0122 25.0187 127.7952 28.0208 86.097 10238.7 590.111 15916.9 328.825 187.421 1.00056 688.408 1392.79 478.637 1368.12 396.991 443.069 865.703 70.0772 34.0202 120.204 212.871 133.257 232.626 35.0477 30.028 14.0079 11.0103 15.0075 134.3488 34.0258 79.0772 10091.1 466.243 16978.7 235.2 169.338 3.00144 603.944 1194.95 422.03 1214.79 303.245 335.969 695.351 62.055 31.0208 130.212 227.839 132.216 206.538 26.0283 20.0139 15.0068 14.0127 14.0054 140.9024 19.0117 80.0836 9356.92 401.3 17697 228.624 135.228 2.00076 520.966 1030.68 396.779 1128.46 270.975 305.727 627.509 65.0605 38.0253 98.1648 164.582 94.1336 165.316 35.0363 22.0157 12.0092 12.0147 18.0096 147.4560 20.0119 66.0536 8890.16 392.4 18362.7 206.111 112.171 1.00034 460.841 923.57 362.519 990.69 247.743 276.255 545.718 54.0324 23.0115 95.141 147.448 104.153 187.408 24.0222 21.0129 8.00405 12.0076 14.0071 154.0096 19.0124 59.0437 8411.76 343.107 18650.9 184.382 96.1518 0 420.383 785.594 300.102 855.008 253.703 272.274 476.051 44.0237 23.0092 78.0967 138.399 80.0852 142.228 23.0216 21.0162 11.006 9.00699 14.0072 160.5632 15.0072 56.0448 7661.76 314.839 19159.1 136.948 93.1318 0 338.48 727.28 299.027 719.955 198.503 227.801 452.808 47.0245 20.008 63.0601 111.295 83.0885 120.169 16.0103 14.0069 10.0051 7.00485 12.0046 167.1168 18.0087 43.0207 7125.4 275.244 19481 137.811 66.0774 0 331.957 635.378 216.605 685.039 177.399 212.799 396.45 43.0233 16.0078 71.0743 107.245 58.0558 110.15 22.0143 17.0106 10.005 11.0067 16.009 173.6704 17.0084 55.0392 6584.17 234.754 19761.2 128.452 81.0959 2.00087 285.537 589.46 233.633 566.545 148.3 166.511 378.308 37.0186 8.00241 60.0539 89.1636 56.0444 110.138 9.00557 11.0057 8.00325 11.0071 8.00241 180.2240 11.0048 29.0157 6112.8 212.928 20101.2 86.473 61.0701 0 246.015 482.701 194.496 501.61 130.209 152.412 251.604 18.0073 11.0031 57.0544 88.175 55.0485 88.0954 14.0079 15.0062 7.00283 10.0063 12.0056 186.7776 8.00278 34.0171 5752.45 173.395 19950.5 86.3236 54.0512 3.0005 235.596 435.481 151.283 375.173 115.185 120.24 226.456 32.0122 9.00172 29.0173 70.1188 46.0295 69.0533 4.00153 6.00232 3.00095 12.0077 8.00238 193.3312 17.0069 28.0123 5319.91 160.574 20338.3 71.8825 43.0402 0 183.477 332.982 114.171 316.732 83.1021 91.1788 187.333 18.0042 10.0014 30.0178 45.0485 31.0163 48.0242 6.00221 14.0055 3.001 2.00156 5.00135