NH_4+ H_3O+ Na+ C_2H_3+ Si+ C_2H_5+ CH_3O+ O_2H_5+ C_3H_3+ C_3H_5+ C_2H_3O+ C_2H_5O+ C_4H_5+ C_4H_7+ C_4H_5O+ C_4H_5N_2+ C_4H_6N_2+ C_4H_7O_2+ O_5H_11+ O_6H_13+ C_6H_9O_2+ O_7H_15+ O_8H_17+ O_9H_19+ O_10H_21+ O_11H_23+ 18.0355 19.0185 22.9910 27.0232 27.9753 29.0395 31.0180 37.0310 39.0231 41.0396 43.0205 45.0350 53.0396 55.0561 69.0357 81.0312 82.0426 87.0468 91.0550 109.0704 113.0662 127.0813 145.0999 163.0893 181.1064 199.1248 Sputter Time (s) Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity 3.2768 1743.27 47.0219 30098 1576.15 6.00101 1283.25 185.321 1.00056 1139.24 2687.54 3753.46 922.437 553.662 974.603 1003.59 366.224 339.515 400.209 251.6 79.1655 158.499 92.2386 40.0561 6.00429 15.0117 19.0099 9.8304 1203.14 147.176 37484.5 1584.32 7.00082 1162.48 290.718 0 1294.07 3052.6 3652.52 2459.59 699.943 985.429 1407.39 362.723 278.144 341.564 303.254 167.588 325.55 71.1906 40.0649 20.019 20.022 24.0134 16.3840 734.207 260.561 40521.3 1982.39 0 1103.68 469.919 1.00065 1649.97 4202.85 3864.55 4210.39 1069.43 1267.21 2013.4 358.25 246.023 365.664 444.444 275.414 632.253 71.2389 50.1051 26.0315 21.0251 26.0227 22.9376 400.287 350.965 41564.9 2359.91 4.00053 1356.34 604.939 3.00305 1951.61 5329.29 4227.57 5777.33 1277.83 1517.11 2747.73 385.169 225.901 389.793 581.147 363.461 875.037 74.3054 81.2414 20.0274 28.0417 28.0309 29.4912 184.273 439.517 39999 2498.68 2.00012 1358.41 818.535 0 2370.23 6164.1 4600.51 6702.31 1396.72 1733.98 3010.05 419.854 202.83 393.875 741.701 435.343 1125.33 69.2437 74.2702 40.0732 28.0449 42.0551 36.0448 89.0714 513.097 37373.8 2788.84 3.00057 1513.39 884.39 1.00076 2509.09 6710.55 4924.49 7472.72 1603.29 1915.03 3487.47 436.712 177.689 433.304 830.042 455.76 1284.32 111.523 74.2541 40.0674 37.063 32.0397 42.5984 63.039 509.057 34453.6 2927.84 1.00008 1560.07 911.741 2.00211 2586.7 7129.08 5032.87 7722.46 1596.65 2018.33 3527.67 434.344 208.976 477.663 906.131 485.13 1356.59 86.4089 75.26 44.082 42.0762 39.0392 49.1520 27.0082 549.357 32066.8 2906.3 1.00005 1574.88 901.716 1.001 2798.72 7621.69 5316.03 8161.13 1714.52 2112.19 3749.25 419.151 203.889 508.063 880.455 558.11 1411.14 102.517 74.261 40.0713 33.0539 37.0529 55.7056 17.0053 567.538 30578.9 2922.42 0 1615.92 898.549 0 2771.86 7645.42 5363.14 8268.22 1836.95 2081.93 3883.54 465.495 206.966 502.07 922.218 535.753 1527.65 106.518 74.3001 39.0688 38.0751 41.0468 62.2592 14.0034 551.388 28765.8 3100.02 1.00002 1637.65 941.428 0 2799.97 7621.73 5476.04 8648.9 1823.64 2242.18 4028.95 396.027 202.916 568.682 962.683 576.367 1491.89 104.508 86.3527 48.0983 39.0671 34.0399 68.8128 14.0034 605.893 27743.4 3062.17 1.00007 1673.88 932.134 0 2858.7 7933.47 5394.24 8460.36 1837.28 2197.53 3900.53 464.535 229.044 553.507 886.114 581.419 1566.48 105.51 117.529 41.0952 37.0684 33.0384 75.3664 12.0022 552.388 27314.2 3049.07 2.00018 1780.78 935.993 2.00205 2923.38 7988.19 5560.22 8753.69 1874.25 2274.56 3912.64 484.774 205.979 528.187 942.286 544.887 1615.74 121.66 99.4069 35.0762 26.0487 54.0781 81.9200 11.0028 605.916 26813.2 3114.42 1.00007 1691.84 953.568 3.00309 2880.45 7958.43 5576.82 8684.5 1832.92 2290.59 4022.14 438.193 193.901 557.622 952.608 572.459 1538.96 106.538 94.3772 44.1002 39.0752 41.0503 88.4736 8.00183 618.026 26065.5 3087.89 1.00011 1795.9 944.256 1.00083 2920.01 8008.64 5653.38 8681.71 1880.18 2348.53 4083.34 477.65 207.899 549.547 903.164 586.755 1516.78 107.496 86.3738 38.0794 42.0825 45.0624 95.0272 9.00196 580.706 25427.8 3152.69 0 1671.35 920.929 0 2921.93 8279.5 5671.81 8859.48 1850.48 2394.29 3999.48 463.615 236.127 542.525 921.016 567.06 1593.23 102.503 75.3081 44.0893 43.088 42.0554 101.5808 17.0056 598.808 25087.1 3110.16 1.0001 1754.52 967.591 1.00082 2895.45 8000.36 5669.21 8814.58 1828.21 2279.89 4065.36 447.148 200.951 531.267 950.602 573.346 1541.36 102.513 93.3857 45.097 41.0809 48.0585 108.1344 17.0053 558.492 25108.7 3073.94 1.00014 1672.39 1013.48 0 2993.85 8208.26 5632.78 8779.43 1891.46 2207.26 4202.6 477.665 193.875 515.935 973.243 575.386 1582.9 98.4962 95.3961 55.1251 32.0558 47.0584 114.6880 12.0024 626.124 25014.3 3152.89 1.00008 1790.51 930.948 0 2886.15 7911.43 5579.61 8632.51 1914.54 2271.68 4033.34 456.467 175.79 581.714 985.642 567.173 1588.19 129.672 89.3387 49.1201 33.0543 47.0666 121.2416 11.0016 596.846 24492.9 3190.83 1.00007 1704.39 976.911 0 2936.5 7994.92 5503.91 8606.42 1832.94 2230.49 4093.1 480.657 200.901 532.355 963.867 550.797 1609.9 114.571 101.444 34.0701 34.0677 47.0623 127.7952 10.0023 557.483 24257.9 3119.98 2.00024 1775.93 910.839 0 2916.92 8020.44 5621.54 8643.31 1854.62 2285.62 4001.05 473.478 203.981 513.164 953.783 563.528 1586.1 104.541 109.475 36.076 36.069 40.0594 134.3488 10.0017 572.589 23661.2 3036.07 7.0008 1701.45 930.104 1.00095 2893.94 7821.94 5444.25 8509.89 1876.88 2250.98 4079.15 449.461 217.013 551.433 906.532 549.061 1536.33 116.598 95.4042 37.071 38.0726 38.0461 140.9024 15.0033 592.763 23656.3 3126.13 22.006 1662.38 912.951 1.00092 2863.75 7829.1 5315.59 8228.47 1838.49 2229 3901.41 473.466 177.841 510.908 919.972 565.131 1509.64 111.644 79.3034 37.0716 27.0462 46.0535 147.4560 16.0036 544.329 23698 2951.62 54.0239 1616.93 884.504 1.00095 2813.05 7222.36 5176.41 7881.91 1701.62 2081.96 3753.37 437.129 200.845 511.073 920.637 544.985 1488.95 115.536 100.405 47.0894 40.0767 35.0397 154.0096 21.0063 505.039 24392.2 2825.91 121.128 1565.69 810.532 0 2588.31 6929.43 4791.75 7484.2 1650.74 1927.59 3329.2 404.883 166.683 419.162 786.439 482.802 1350.96 108.512 66.2255 41.0705 20.0307 31.0278 160.5632 43.0194 447.566 25515.7 2495.7 274.6 1379.37 735.546 3.00296 2215.85 6161.31 4179.61 6317.85 1410.35 1729.7 2883.68 366.561 147.492 377.82 698.99 398.86 1062.39 85.3455 59.1773 25.0388 32.0497 26.0244 167.1168 43.0174 324.853 26378 1972.43 517.127 1100.97 546.547 1.00071 1877.28 4814.82 3180.83 4491.15 1099.29 1296.35 2041.11 242.859 115.267 279.022 495.508 278.281 721.808 55.1514 37.0737 21.0271 16.0186 17.0108 173.6704 45.0218 237.451 23570.3 1411.74 953.041 753.377 404.41 2.00144 1341.74 2963.37 1855.71 2532.02 675.515 777.117 1154.75 154.37 70.1058 158.382 289.201 177.532 432.171 27.0448 23.0276 16.0127 8.00484 13.0046 180.2240 35.0126 92.0717 17848.6 850.637 1467.55 439.605 182.337 0 764.381 1513.76 860.46 1079.83 335.819 380.667 481.334 85.1409 30.0167 64.102 167.631 62.072 148.282 15.0119 11.0075 5.00179 8.00261 2.00067 186.7776 11.0011 37.0105 13209.8 467.789 2008.81 196.276 90.0949 0 485.379 666.982 347.376 381.136 179.621 140.36 183.376 26.0214 11.0026 24.0172 60.0871 27.0126 47.0319 4.0011 1.00019 5.00095 1.00005 3.00039 193.3312 6.00064 14.0015 10493.8 219.797 2065.56 78.8215 39.017 0 209.953 256.729 127.207 117.13 67.1207 43.0485 43.0317 15.0065 3.00048 8.00183 33.0229 8.00096 22.0071 0 2.00021 2.00021 1.00004 1.00005