NH_4+ H_3O+ Na+ C_2H_3+ Si+ C_2H_5+ CH_3O+ O_2H_5+ C_3H_3+ C_3H_5+ C_2H_3O+ C_2H_5O+ C_4H_5+ C_4H_7+ C_4H_5O+ C_4H_5N_2+ C_4H_6N_2+ C_4H_7O_2+ O_5H_11+ O_6H_13+ C_6H_9O_2+ O_7H_15+ O_8H_17+ O_9H_19+ O_10H_21+ O_11H_23+ 18.0347 19.0179 22.9907 27.0237 27.9750 29.0401 31.0182 37.0286 39.0228 41.0397 43.0206 45.0355 53.0382 55.0550 69.0368 81.0345 82.0427 87.0476 91.0554 109.0717 113.0686 127.0801 145.1017 163.0911 181.1049 199.1202 Sputter Time (s) Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity Intensity 0.0000 4625.53 242.835 1160.41 3336.48 27.0256 4040.87 670.938 1.00414 3484.4 9658.55 12433.9 3586.23 2575.94 5278.35 3570.02 1593.96 1851.99 2085.25 1790.68 494.381 876.176 558.234 286.192 68.0972 142.104 141.906 2.9999 3925.09 603.073 1401.61 4520.3 8.00354 2917.54 829.814 3.01333 3224.74 9332.56 12023.2 6807.65 2004.84 3195.47 6155.4 1018.33 1054.02 2228.22 951.156 778.43 1980.46 446.576 145.763 67.6675 57.5943 69.4842 5.9998 824.171 1667.43 1855.26 6943.72 1.00046 3234.74 2076.65 6.04241 5771.17 21658 14913.5 27699 3805.09 5533.65 19073.2 1083.96 672.516 3243 1751.7 2597.04 7722.84 513.17 249.804 144.52 73.8179 145.538 8.9996 290.812 1857.9 2317.5 7512.7 1.00009 3528.68 2353.28 4.02617 6371.63 23860.8 16193.3 32724.9 4423.86 6311.93 21874 1165.02 631.591 3490.79 1968.1 3018.3 9332.65 571.917 275.177 185.012 83.0894 151.814 11.9995 218.638 1965.81 2384.64 7837.22 2.00061 3389.26 2447.73 5.03302 6297.37 24360.2 16305.2 32887.6 4371.45 6260.19 22751.8 1182 659.235 3599.93 2031.01 3156.46 9437.49 520.895 316.384 193.323 104.422 162.222 14.9994 143.742 1756.49 2251.94 7744.77 0 3519.42 2269.25 11.0659 6166.92 24049.6 15898.6 33149.5 4445.69 6177.07 22530.6 1209.44 649.78 3515.19 2016.86 3052.14 9492.64 558.371 296.426 210.806 72.9411 157.767 17.9993 134.675 1919.76 2303.82 7871.02 1.00021 3490.31 2421.41 6.04309 6380.83 24844.9 16178.8 34120.7 4520.39 6222.9 23071.2 1234.28 637.651 3624.44 1994.77 3180.59 9758.27 531.807 313.372 210.971 93.2822 157 20.9992 120.552 1914.38 2336.56 7833.96 2.00061 3579.01 2373.68 3.01697 6465.54 24608.6 16258 33970.1 4585.01 6366.85 23143.6 1197.7 647.044 3762.47 2070.87 3199.01 9822.7 542.655 268.762 190.033 93.3297 155.802 23.9990 111.535 1935.51 2285.96 7929.24 2.00024 3677.21 2450.03 7.04926 6739.47 25391 16525.7 34233.2 4487.17 6461.32 23749 1257.16 624.688 3888.42 1994.1 3370.24 9896.83 562.483 309.173 187.841 102.356 153.97 26.9989 93.3621 1846.82 2202.79 7708.9 2.00098 3510.99 2414.15 7.04883 6382.82 24313.5 16238.3 33649.5 4414.49 6288.54 23183.6 1138.27 609.491 3707.4 2120.94 3338.34 9856.59 594.407 326.082 190.229 106.481 144.615 29.9988 78.2533 2032.01 2188.92 7858.82 0 3518.71 2512.54 10.0751 6605.62 25507.4 16041 34317 4495.7 6324.92 23891.8 1162.66 597.503 3682.97 2120.87 3296.42 10168.1 576.884 295.431 199.017 83.0917 150.735 32.9987 74.213 1844.34 2164.21 7641.84 1.00034 3562.69 2515.41 7.04296 6510.82 24662.7 16229.6 33391.6 4630.56 6620.24 22681 1209.32 638.321 3585.54 2079.49 3237.16 9936.06 591.797 318.142 184.757 85.2153 167.169 35.9986 95.4342 2025.08 2028.35 7953.41 3.00046 3565.82 2378.66 12.0909 6434.41 25081.4 15936.6 33880.3 4628.87 6608.49 23638.1 1158.07 677.914 3656.81 2141.05 3263.68 10006.7 550.649 310.332 205.812 96.3663 158.96 38.9984 62.1784 1950.66 1848.18 7789.56 0 3509.21 2435.4 15.1232 6604.34 25500.6 16447.6 33203.1 4471.78 6325.9 23821.6 1165.04 640.52 3754.83 2156.08 3311.64 10090.8 609.293 285.063 217.84 99.4426 153.811 41.9983 109.451 1918.38 1752.26 7489.43 0 3440.99 2387.43 12.0906 6524.88 24671.9 16205.9 33344 4435.18 6314.21 23201.2 1174.14 611.317 3666.19 2054.89 3313.88 9655.1 559.428 301.852 185.169 96.3408 164.174 44.9982 64.1803 1986.38 1665.11 7804.74 0 3526.71 2372.23 8.04962 6411.88 23969.1 16054.7 33621.1 4513.35 6353.41 23339.9 1136.54 661.853 3766.73 2047.59 3271.99 9754.4 637.752 311.571 208.534 124.858 136.48 47.9981 67.199 1937.64 1743.91 7869.9 0 3449.69 2476.63 12.0789 6397.52 25003.9 16137.6 33652.7 4581.06 6345.15 23160.8 1168.78 659.974 3841.39 2182.91 3202.2 9739.38 579.664 314.738 201.347 104.599 144.839 50.9980 69.2262 1934.38 1631.93 7630.71 0 3411.37 2411.33 12.0752 6472.79 24676 16245.7 33240 4331.73 6379.22 23223.9 1181.61 629.66 3649.38 2015.28 3341.9 9663.13 564.056 268.018 191.925 91.263 150.827 53.9978 70.2058 1892.15 1637.56 7616.05 0 3470.29 2516.58 8.06485 6474.16 24440.8 15828.6 33504.4 4499.03 6328.09 23018.5 1158.42 659.649 3612.78 1992.43 3288.19 9744.49 638.587 292.881 204.494 89.2102 130.356 56.9977 69.2262 1848.18 1673.18 7477.08 0 3496.96 2326.61 12.0952 6307.61 24222.1 15783.8 33074.2 4432.15 6275.94 23019.1 1128.6 617.19 3706.25 2120.14 3320.05 9693.9 559.684 287.754 194.294 113.663 141.606 59.9976 72.2249 1842.46 1597.91 7923.06 1.00009 3405.81 2465.18 12.1012 6392 24406.5 16237.1 33723.5 4604.08 6387.76 23363.3 1155.79 623.221 3791.48 2134.01 3259.74 9901.48 583.288 317.986 208.529 93.1714 155.969 62.9975 62.1518 1898.65 1480.34 7556.75 2.00012 3329.94 2369.2 16.1062 6249.47 23665.4 15886.2 33443.6 4429.7 6198.18 22884.9 1093.76 587.386 3639.36 2052.21 3084.37 9572.56 588.251 281.466 189.979 95.3554 132.387 65.9974 66.2185 1916.63 1592.09 7941.3 0 3539.98 2512.75 11.0659 6440.78 24557.7 16359.1 33465.2 4640.88 6473.72 23662.5 1204.38 637.636 3806.63 2176.79 3375.15 10006.5 606.535 326.213 196.462 99.4314 172.105 68.9972 74.2585 1989.89 1627.4 7893.17 1.00021 3488.59 2513.58 10.0701 6592.64 24766.6 16116.9 33721.6 4672.88 6229.17 23581.4 1200.13 626.158 3805.22 2135.74 3347.62 9944.33 625.576 332.013 166.718 108.597 154.864 71.9971 75.2919 1950.4 1620.88 7667.47 0 3581.08 2488.94 11.074 6367.3 24699.3 16155.9 33796.6 4396.31 6551.86 23339.9 1163.49 612.809 3896.12 2123.98 3340.2 9934.25 571.952 299.376 198.222 114.737 154.948 74.9970 62.167 1989.38 1608.74 7708.09 0 3392.2 2439.64 12.0856 6456.3 25271.2 16161.1 34021.9 4371.38 6436.82 23660.4 1185.31 605.224 3709.37 2204.82 3397.24 9929.95 639.851 324.931 211.36 108.38 176.172 77.9969 70.2058 1952.15 1638.87 7646.7 2.00024 3580.4 2470.03 16.119 6373.2 24453.2 16332.3 33238.5 4422.43 6344.88 23262.9 1219.82 624.527 3781.26 2029.59 3438.81 9817.21 622.228 309.821 178.801 89.2065 161.048 80.9968 77.2666 2023.42 1616.67 7714.43 2.00037 3444.27 2493.06 14.0934 6390.57 25142.7 16050.9 34532.6 4481.22 6508.11 23915.3 1168.84 621.109 3763.52 2149.11 3354.59 9953.63 618.959 300.779 175.712 110.635 160.994 83.9966 67.2402 1913.63 1530.98 7598.56 0 3422.48 2376.47 15.1176 6201.07 24220.6 15960.9 33289.5 4395.82 6283.42 22916.8 1210.97 637.336 3666.97 2003.13 3365.34 9658.92 587.99 293.985 198.566 88.1662 157.004 86.9965 68.2165 1913.63 1659.53 7741.81 0 3519.75 2529.14 13.0963 6410.99 24763.5 15697 33491.3 4622.29 6182.43 23463 1122.92 655.559 3826.92 2163.9 3240.06 9811.29 605.335 330.309 181.901 118.728 155.69 89.9964 60.18 1903.9 1630.93 7591.4 0 3445.13 2405.34 20.1533 6225.57 24305.5 16149.7 33686.7 4389.98 6365.58 23259.6 1213.26 647.928 3750.71 2072.5 3234.27 9815.78 613.918 321.87 173.598 103.392 184.282 92.9963 64.1685 1917.63 1698.47 7578.84 2.00024 3606.79 2369.51 14.1163 6340.26 24250.2 16359.6 33426.1 4542.77 6413.36 23382.1 1159.17 623.97 3660.59 2107.84 3274.59 9905.22 611.194 346.59 194.211 103.499 164.917 95.9962 63.1639 1991.64 1641.19 7535.28 1.00015 3411.53 2402.95 11.0597 6385.42 24554 15937 33337.7 4295.65 6254.82 23303.8 1168.09 625.765 3823.46 2103.49 3299.32 10092.6 587.978 322.113 192.986 105.497 168.082 98.9960 57.1518 1908.39 1682.72 7664.25 2.00085 3429.88 2390.37 16.1091 6529.28 24905.8 15760.2 33720 4574.41 6446.73 23475.5 1177.98 615.798 3783.96 2216.46 3321.37 9787.69 608.778 349.592 220.68 96.4869 149.637 101.9959 56.168 1984.37 1726.12 7729.07 1.00021 3549.6 2407.91 10.0707 6205.71 24143.8 15613.5 32780.9 4412.77 6340.3 22542.1 1113.3 622.334 3799.07 2135.45 3356.94 9538.31 636.896 333.751 186.907 101.488 152.837 104.9958 71.1935 1957.29 1695.79 7666.11 0 3428.17 2387.91 20.134 6352.8 24218.3 16025.4 33906 4464.71 6294.03 23455.6 1120.3 637.27 3698.14 2156.3 3267.85 9779.13 576.803 276.275 199.996 97.2116 170.186 107.9957 70.2058 1928.13 1678.4 7892.69 1.00003 3388.09 2449.48 20.1375 6237.23 24556 15881.9 33104.2 4596.38 6236.66 24053.8 1172.23 657.282 3708.77 2142.13 3317.47 10051.7 588.202 340.61 237.408 116.746 145.682 110.9956 58.1883 1941.64 1741.24 7645.51 0 3429.06 2459.34 16.1062 6368.54 24328.9 16302.6 33442.6 4520.1 6291.94 23143.8 1120.41 624.836 3671.33 2120.58 3272.21 10002.5 598.422 310.565 195.016 117.836 152.786 113.9954 52.1592 1864.62 1749.58 7488.8 0 3262.54 2359.29 14.1042 6128.67 23903.9 15684.9 32883.5 4442.62 6057.08 23480.4 1138.05 613.239 3674.08 2061.22 3275.44 9830.12 580.754 313.427 223.073 100.423 142.824 116.9953 67.1826 1893.16 1790.93 7534.5 0 3382.78 2357.53 13.0918 6454.42 23819.9 15800 32635.1 4394.83 6339.08 23011.1 1151.67 678.981 3703.7 2133.62 3235.15 9822.43 593.684 339.392 220.625 93.3534 152.991 119.9952 63.1678 1962.3 1776.66 7585.14 0 3453.54 2361.85 18.1217 6383.03 24594.3 16370.9 33293.7 4408.66 6108.32 23481.3 1155.61 628.364 3717.89 2188.21 3439.08 9976.06 607.636 323.092 182.695 91.1815 155.821 122.9951 57.1623 1983.86 1782.12 7489.91 1.00009 3437.95 2371.58 18.1172 6181.03 23776.8 15830 32912.5 4427.74 6281.06 23043.3 1119.66 672.962 3666.94 2014.84 3327.79 9646.95 605.495 323.779 190.901 80.1725 153.659 125.9950 52.1465 1918.51 1833.86 7549.95 0 3551.98 2411.87 16.1181 6367.06 23972.9 15921.3 32788.9 4496.59 6188.14 23539.1 1144.64 612.726 3766.36 2203.14 3287.06 9655.99 585.617 318.965 198.685 99.3623 161.932 128.9948 55.1498 1934.01 1819.2 7617.11 1.0004 3415.73 2384.71 12.0945 6204.79 23961.4 15747.8 33485.4 4298.28 6035.22 22603.9 1077.29 647.532 3699 2091.7 3281.83 9938.74 517.752 340.44 209.408 98.4039 195.59 131.9947 52.1465 1975.96 1888.3 7431.13 1.00034 3382.2 2377.85 18.1397 6278.62 24079 15648 32760.5 4342.47 6138.7 23054.5 1194.69 665.055 3769.24 2105.38 3301.76 9608.38 580.85 334.902 192.13 87.1494 158.037 134.9946 49.1155 1929.88 1764.4 7677.8 0 3461.74 2401.73 23.1548 6318.05 23907 16070.8 33444.9 4546.69 6537.97 23590.3 1158.87 587.628 3631.06 2147.13 3140.86 9903.1 588.626 313.254 189.765 103.43 171.079 137.9945 62.1899 1882.56 1853.66 7229.72 1.00009 3277.54 2365.81 12.0864 6233.86 23413.9 15945.8 32977.4 4324.87 6116.13 22647.5 1138.57 611.43 3625.57 1977.02 3249.49 9576.99 576.367 313.244 207.665 97.3198 153.838 140.9944 52.1401 1890.3 1946.91 7614.46 1.00015 3436.34 2380.07 12.078 6298.5 23912 15638.9 33052.4 4433.51 6366.71 23219.5 1187.16 636.611 3716.52 2033.81 3280.92 9951.59 592.007 325.35 198.103 90.2271 152.964 143.9942 36.0594 1966.06 1872.59 7435.21 2.00049 3424.08 2391.73 22.161 6270.67 23178.5 15700.8 32339.5 4470.11 6174.29 22896 1205.9 648.946 3623.04 2013.86 3077.9 9671.86 596.75 335.93 208.191 99.344 176.256 146.9941 55.1296 1979.99 1944.52 7558.83 1.00021 3387.19 2457.43 14.099 6305.27 24365.5 15733.1 33408.1 4451.16 6249.09 23404.1 1130.71 625.8 3754.45 2048.41 3320.52 9652.93 571.095 351.996 203.573 105.546 187.458 149.9940 52.1305 1768.4 1825.32 7291.42 0 3385.67 2361.68 13.0947 6165.77 23411.8 15064 32669.2 4314.48 6131.47 22815 1111.14 612.768 3579.52 2102.14 3250.41 9741.26 564.664 292.46 210.533 95.1815 146.605 152.9939 42.0796 1975.7 1939.52 7449.9 1.00027 3332.79 2411.83 19.1173 6355.52 24510 15777.6 33024.2 4474.52 6286.79 22810.4 1150.34 610.558 3593.24 2175.7 3190.3 9672.82 581.837 312.771 196.416 121.839 154.968 155.9938 57.1588 1933.13 1897.4 7419.31 2.00061 3395.88 2272.46 11.0781 6239.25 23700.6 15596.9 32119.8 4237.96 6290.63 22967.8 1144.43 641.653 3565.12 2038.72 3157.09 9532.16 616.671 334.334 199.51 111.568 166.836 158.9936 49.1124 1993.15 1985.86 7465.69 0 3273.72 2435.44 22.1365 6177.29 23717.5 15718.3 32320.9 4369.08 6254.73 22824.7 1128.26 628.138 3826.3 2107.31 3180.74 9651.85 584.895 334.939 204.147 110.646 150.821 161.9935 40.1053 1970.19 2035.27 7450.77 0 3347.78 2367.73 11.0781 6049.82 23626.1 15700.3 32371.7 4354.8 6251.45 23325.7 1155.08 658.097 3593.75 2022.91 3228.25 9608.24 574.09 298.155 218.461 103.386 167.94 164.9934 41.1092 1929.01 2012.5 7347.08 0 3361.47 2358.97 17.1133 6095.36 23248.8 15173.4 31764.2 4217.65 6193.05 22827.9 1067.26 635.418 3560.35 2013.29 3207.77 9502.98 581.224 316.41 205.607 83.0351 174.241 167.9933 55.1735 1945.9 1949.66 7284.3 0 3112.72 2274.87 12.0655 6006.78 22942.5 15075.8 31435.7 4156.45 6182.29 22663.1 1134.37 618.612 3613.03 1959.51 3129.51 9512.55 552.7 289.998 221.93 97.3671 159.854 170.9932 60.1506 1958.17 1928.76 7117.07 0 3102.41 2159.91 17.1228 5922.76 23033.5 15061 31652.3 4223.5 5937.53 21940.4 1108.9 587.759 3395.23 1939.94 3136.85 9216.96 563.861 298.389 188.742 104.402 152.65 173.9930 47.1165 1936.76 1951.02 7276.94 0 3205.63 2294.02 16.1052 5971.08 22647.4 15163.1 32506.6 4216.41 5959.12 22377.4 1086.75 592.937 3571.59 2010.03 3053.94 9195.88 560.26 327.05 178.506 92.1552 176.083 176.9929 51.117 1878.2 1944.39 7218.73 0 3187.06 2253.2 16.1141 6055.72 23053 14997.2 31601.5 4158.27 6064.26 22072.5 1087.87 586.865 3441.92 1929.76 3002.54 9095.02 542.971 300.075 172.046 100.517 167.972 179.9928 52.1465 1896.16 2083.06 7387.91 0 3289.62 2223.79 23.1391 6082.54 23501.5 15059.1 32275.1 4125.93 5904.74 22580.1 1073.46 599.728 3548.39 2020.44 3183.66 9382.57 519.432 299.164 192.917 85.1371 143.543 182.9927 54.1356 1882.81 2024.69 7145.4 0 3125.09 2368.61 13.0848 5749.38 22806.8 15097.8 31689.9 4039.59 5976.1 22057 1073.08 581.255 3457.74 1932.56 3132.48 9069.07 522.692 306.512 195.961 91.166 183.114 185.9926 46.0957 1844.81 2061.81 7031.87 3.00046 3251.88 2253.24 23.1804 6106.68 23140.2 15169 32036.6 4182.43 5912.56 22496.4 1146.1 616.829 3493.74 1926.13 3015.52 9384.3 582.597 309.468 194.014 98.3553 159.982 188.9924 45.0977 1814.5 2033.74 7349.87 0 3273.92 2202.7 18.1274 6154.97 23171.7 14593.1 32139.5 4104.7 5951.55 22044 1078.08 602.134 3422.26 1941.76 3026.59 9114.53 533.682 290.15 185.803 84.0456 145.457 191.9923 37.0894 1895.79 2048.47 7221.32 1.00015 3419.19 2317.42 19.1466 6082.59 23186.2 14965.4 31655.3 4237.18 6008.73 22691 1073.64 611.906 3438.72 1889.94 3194.88 9249.45 595.299 314.894 204.353 97.3123 145.652 194.9922 52.1369 1844.46 2016.63 6932.27 1.00021 3148.66 2135.99 15.1186 5726.4 22549.6 14876.4 30886.7 4090.3 5971.15 22032.8 1006.46 585.125 3387.55 1893.78 3003.15 8946.02 549.961 303.198 197.595 98.3229 152.757 197.9921 44.1077 1934.51 2144.39 7223.95 1.00009 3229.73 2223.47 26.1854 6030.75 22631.9 15179.6 31762.9 4325.59 6125.58 22185.5 1063.69 575.72 3410.5 1974.52 3164.11 9298.93 569.459 303.707 184.947 89.0571 164.991